Influence of Substrate Miscut on the Island Formation Process in In0.2Ga0.8As/GaAs Multilayers

Autor: D. Barlam, D. Mogilyanski, E. Gartstein
Rok vydání: 2003
Předmět:
Zdroj: Surface Review and Letters. 10:263-270
ISSN: 1793-6667
0218-625X
DOI: 10.1142/s0218625x03005049
Popis: LPOMVPE-grown In0.2Ga0.8As/GaAs multilayers on GaAs substrates with miscut values of 0°, 0.3° and 2° around the [100] azimuthal direction were investigated by employing X-ray diffraction techniques complemented by atomic force microscopy (AFM) and transmission electron microscopy (TEM). The step-terrace structure evolving on the interfaces upon deposition strongly depends on the initial substrate morphology. The initiation of island nucleation, and both lateral and vertical ordering are related to the interfacial morphological parameters. Finite element analysis (FEA) is performed to elucidate the interplay between structural and strain relaxation processes.
Databáze: OpenAIRE