Large area deposition of YBCO thick films for applications in resistive fault current limiting devices
Autor: | R. Wördenweber, Herbert C. Freyhardt, Bernd Stritzker, Wolfgang Schmidt, V. Kirchhoff, H.-W. Neumüller, Helmut Kinder |
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Rok vydání: | 1997 |
Předmět: |
Materials science
business.industry Mechanical Engineering Metals and Alloys 02 engineering and technology Substrate (electronics) Sputter deposition 021001 nanoscience & nanotechnology 01 natural sciences Pulsed laser deposition Mechanics of Materials visual_art 0103 physical sciences Materials Chemistry visual_art.visual_art_medium Optoelectronics Wafer Ceramic 010306 general physics 0210 nano-technology Ion beam-assisted deposition business Layer (electronics) Deposition (chemistry) |
Zdroj: | Journal of Alloys and Compounds. 251:366-372 |
ISSN: | 0925-8388 |
DOI: | 10.1016/s0925-8388(96)02691-6 |
Popis: | The preparation of the switching element of a resistive superconducting fault current limiter requires the up-scaling of deposition techniques for thin YBa 2 Cu 3 O 7−δ (YBCO) films to large areas and high film thicknesses. For a projected 100 kVA limiter model an area of about 400 cm 2 and a film thickness of up to 5 μm will be necessary, depending on the material properties like critical current density j c and normal state resistivity ρ a . Within a joint project various deposition methods including pulsed laser deposition (PLD), magnetron sputtering (MS), thermal evaporation (TE) and plasma flash evaporation (PFE) are evaluated as possible candidates for the operation of deposition systems capable of coating 20×20 cm 2 substrates. Both single crystalline wafers and polycrystalline ceramic plates are considered as substrates. To achieve high j c on polycrystalline substrate materials an additional zirconia buffer layer consisting of biaxially orientated crystallites has to be prepared by ion beam assisted deposition (IBAD). In small samples with IBAD buffer critical currents above 10 6 A cm −2 with a maximum of 1×10 6 A cm −2 have been achieved. The presently available sample sizes depend on the installed systems for YBCO and buffer deposition respectively and on the commercial availability of the substrate material. The largest samples which have been prepared and characterised have sizes of 1×25 cm 2 and 5×5 cm 2 for PLD. 10×10 cm 2 for TE and IBAD, 2 in. (1 in.=2.54 cm) diameter for MS, and 3×7 cm 2 for PFE. The corresponding highest film thicknesses are 4.5 μm for PLD, 1.4 μm for TE, 1.6 μm for IBAD and 0.4 μm for MS. |
Databáze: | OpenAIRE |
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