Nondestructive Location of Oxide Breakdowns on MOSFET Structures

Autor:	P. L. Garbarino, R. D. Sandison
Rok vydání:	1973
Předmět:	Materials science Renewable Energy Sustainability and the Environment business.industry Oxide Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials chemistry.chemical_compound chemistry MOSFET Materials Chemistry Electrochemistry Optoelectronics business
Zdroj:	Journal of The Electrochemical Society. 120:834
ISSN:	0013-4651
DOI:	10.1149/1.2403571
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::1e03d1c0f89d4871be9a2f275516b8ec https://doi.org/10.1149/1.2403571 Zobrazit plný text záznamu