Alternative surface reaction route in the atomic layer deposition of NbN thin films for reduced resistivity

Autor:	Hyeok Jae Lee, Seo Young Jang, Hye Min Lee, Ju Young Sung, Se Eun Kim, Jae Deock Jeon, Yewon Yun, Sang Woon Lee
Rok vydání:	2023
Předmět:	Mechanics of Materials Mechanical Engineering Materials Chemistry Metals and Alloys
Zdroj:	Journal of Alloys and Compounds. 952:170033
ISSN:	0925-8388
DOI:	10.1016/j.jallcom.2023.170033
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::1df3543258f04a662e9a8501f31e32a0 https://doi.org/10.1016/j.jallcom.2023.170033 Zobrazit plný text záznamu Full Text from ScienceDirect