Laser-chemical modification of nucleation barriers for area-selective thin film growth

Autor: D.J. Ehrlich, J.Y. Tsao
Rok vydání: 1984
Předmět:
Zdroj: Journal of Crystal Growth. 68:176-187
ISSN: 0022-0248
DOI: 10.1016/0022-0248(84)90414-7
Popis: The use of laser radiation to locally modify nucleation barriers to thin film growth is discussed. Examples are described in which UV laser photodeposition is used to directly pattern surface-altering monolayer or submonolayer films. The surface-altering films can then be used to promote or both physical condensation as well as surface chmistry. A qualitative is made of two kinds of processes: those relying on physical, and those relying on chemical, barriers. A figure of merit is defined and discussed, which measures the selectivity of a given process for patterned growth.
Databáze: OpenAIRE