Parallel Integration of Nanoscale Atomic Layer Deposited Ge2Sb2Te5 Phase-Change Memory with an Indium Gallium Zinc Oxide Thin-Film Transistor
| Autor: | Wonho Choi, Gilseop Kim, Hyun Young Kim, Chanyoung Yoo, Jeong Woo Jeon, Byongwoo Park, Gwangsik Jeon, Sangmin Jeon, Sukin Kang, Yonghee Lee, Cheol Seong Hwang |
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| Rok vydání: | 2023 |
| Předmět: | |
| Zdroj: | ACS Applied Electronic Materials. 5:1721-1729 |
| ISSN: | 2637-6113 |
| DOI: | 10.1021/acsaelm.2c01757 |
| Databáze: | OpenAIRE |
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