Functionalization of parylene during its chemical vapor deposition

Autor: Herbert Keppner, Jerome Charmet, Piotr Skurski, Edith Laux, Maria Naddaka, Maciej Bobrowski, Florian Asen, Sylwia Freza, Monika Bauer, Jean-Paul Lellouche
Rok vydání: 2011
Předmět:
Zdroj: Journal of Polymer Science Part A: Polymer Chemistry. 49:2952-2958
ISSN: 0887-624X
DOI: 10.1002/pola.24731
Popis: Two possible mechanisms for the reaction of four halogenated (metha)acrylate-based molecules with Parylene (poly (paraxylylene)) during its chemical vapor deposition were proposed. The chemical reactivity of acrylate double bond with the paraxylylene biradical was calculated for all four (metha)a- crylate-based molecules. These calculations allowed the evalua- tion of the energetically favorable mechanism and indeed a direct correlation was found between both predicted and exper- imental reactivities. Next, the reactivity of the (metha)acrylate- modified Parylene films was evaluated through their reaction with different amines. The obtained amidated Parylene films were characterized with X-ray photoelectron spectroscopy, Kaiser test for primary amines, and fluorescence microscopy. The strong reactivity of (metha)acrylate-modified Parylene films toward nucleophilic substitution emphasizes a general method for the functionalization of self-supported Parylene films grown on the reacting solutions using the novel solid on liquid deposi- tion process. This paves the way to the development of multi- functional materials in a one-step process resulting from the deposition Parylene over liquid patterns. V C 2011 Wiley Periodi- cals, Inc. J Polym Sci Part A: Polym Chem 49: 2952-2958, 2011
Databáze: OpenAIRE