Effect of polymer thickness on the chemical sensing behavior of polymer-coated mass-sensitive disk resonators

Autor:	Andreas Hierlemann, S. Truax, Luke A. Beardslee, Yulia Luzinova, K.S. Demirci, Boris Mizaikoff, Oliver Brand
Rok vydání:	2011
Předmět:	chemistry.chemical_classification Detection limit Isobutylene Materials science Silicon chemistry.chemical_element Polymer Toluene chemistry.chemical_compound Resonator Surface micromachining chemistry Electronic engineering Composite material Benzene
Zdroj:	2011 IEEE 24th International Conference on Micro Electro Mechanical Systems.
DOI:	10.1109/memsys.2011.5734559
Popis:	The chemical sensing behavior of disk microresonators, as it is affected by the thickness of polymer coatings applied to them, is reported. The disk microresonators were fabricated using a CMOS-compatible silicon bulk micro machining process. The disks were subsequently coated with layers of (poly) isobutylene (PIB) as a sensing film and exposed to gaseous benzene, toluene, and m-xylene. The experimental results agree well with analytical models derived for both the chemical sensitivity and limit of detection (LOD). Minimal LODs measured for benzene, toluene, and m-xylene were 5.3 ppm, 1.2 ppm, and 0.6 ppm, respectively.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::1d05255eff26ccec91632c4f2d2ed837 https://doi.org/10.1109/memsys.2011.5734559 Zobrazit plný text záznamu