Proton Radiation Effects on MEMS Silicon Strain Gauges
| Autor: | Alan Richard Wilson, P. McMahon, D.G. Marinaro |
|---|---|
| Rok vydání: | 2008 |
| Předmět: |
Microelectromechanical systems
Nuclear and High Energy Physics Materials science Proton Silicon technology industry and agriculture chemistry.chemical_element Piezoresistive effect Proton radiation Nuclear Energy and Engineering chemistry Electronic engineering Irradiation Electrical and Electronic Engineering Composite material Strain gauge |
| Zdroj: | IEEE Transactions on Nuclear Science. 55:1714-1718 |
| ISSN: | 0018-9499 |
| DOI: | 10.1109/tns.2008.921933 |
| Popis: | A microelectromechanical system (MEMS) strain gauge constructed from single-crystalline silicon has been developed for application in aircraft structural-health-monitoring. The effects of proton irradiation on the piezoresistive elements of the silicon strain gauges are examined. Degradation in the piezoresistive response at applied strains above 2000 microstrain is observed. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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