Calibration method for rotating-analyser-type spectral imaging ellipsometers

Autor:	Se Baek Oh, Yun Woo Lee, Soohyun Kim, Won Chegal, Hyun Mo Cho, Yong Jai Cho
Rok vydání:	2005
Předmět:	medicine.medical_specialty Materials science Physics::Instrumentation and Detectors business.industry Applied Mathematics Analyser Polarization (waves) Spectral imaging Optics Ellipsometry medicine Wafer Thin film business Instrumentation Engineering (miscellaneous) Spectrograph Data reduction
Zdroj:	Measurement Science and Technology. 16:716-722
ISSN:	1361-6501 0957-0233
DOI:	10.1088/0957-0233/16/3/014
Popis:	Data reduction and calibration procedures are introduced for a novel rotating-analyser-type spectral imaging ellipsometer. Using a monaxial power spectrograph, we developed a unique spectral imaging ellipsometer. It combines one-dimensional imaging ellipsometry with spectroscopic ellipsometry, and enables real-time measurement of the optical parameters and dimensional structures of patterned or multilayered thin film. It also has more calibration factors than conventional ellipsometers. We therefore present a method using Jones matrices for describing the polarization sensitivity of the spectrograph and random noise of the CCD array. For a patterned SiO2 layer on a silicon wafer, we used the spectral imaging ellipsometer to obtain a one-dimensional thickness profile.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::1ca436f6d286fe41155901641f66759a https://doi.org/10.1088/0957-0233/16/3/014 Zobrazit plný text záznamu