Preparation and Sorption Properties of Zr-Co-Ce Getter Films
| Autor: | Jian Dong Cui, Xiao Qiang Xu, Yao Hua Xu, Hua Ting Wu |
|---|---|
| Rok vydání: | 2018 |
| Předmět: |
Materials science
Mechanical Engineering Sorption 02 engineering and technology Sputter deposition 010402 general chemistry 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences 0104 chemical sciences Chemical engineering Mechanics of Materials Getter General Materials Science 0210 nano-technology |
| Zdroj: | Materials Science Forum. 913:700-706 |
| ISSN: | 1662-9752 |
| DOI: | 10.4028/www.scientific.net/msf.913.700 |
| Popis: | In order to further study the relationship between sorption properties of ZrCoCe thin films and magnetron sputtering process parameters, ZrCoCe getter films were deposited on the Si(100) substrate by DC magnetron sputtering. In this paper, background vacuum, sputtering pressure and sputtering power as experimental variables were discussed in detail. The surface and cross section microstructure and phase of the film were determined by scanning electron microscopy (SEM) and H2 sorption measurement of films was carried out by a dynamic sorption method. It is demonstrated that porous columnar structure film can be achieved under the conditions of the background degree less than 5.0×10-4 Pa, sputtering pressure is 4 Pa and sputtering power is 120 W. As a result of the optimization of the porous columnar structure, the sorption properties of the films are also improved. |
| Databáze: | OpenAIRE |
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