6-MHz 2-N/m piezoresistive atomic-force microscope cantilevers with INCISIVE tips
| Autor: | Daniel Rugar, Harry Jonathon Mamin, Bruce D. Terris, R.P. Ried, L.S. Fan |
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| Rok vydání: | 1997 |
| Předmět: |
Materials science
Cantilever business.industry Mechanical Engineering Analytical chemistry Silicon on insulator Piezoresistive effect Noise (electronics) Radius of curvature (optics) Surface micromachining Etching (microfabrication) Optoelectronics Wafer Electrical and Electronic Engineering business |
| Zdroj: | Journal of Microelectromechanical Systems. 6:294-302 |
| ISSN: | 1057-7157 |
| DOI: | 10.1109/84.650125 |
| Popis: | Piezoresistive atomic force-microscope (AFM) cantilevers with lengths of 10 /spl mu/m, displacement sensitivities of (/spl Delta/R/R)/A 1.1/spl times/10/sup -5/, displacement resolutions of 2/spl times/10/sup -3/ A//spl radic/Hz, mechanical response times of less than 90 ns, and stiffnesses of 2 N/m have been fabricated from a silicon-on-insulator (SOI) wafer using a novel frontside-only release process. To reduce mass, the cantilevers utilize novel inplane crystallographically defined silicon variable aspect-ratio (INCISIVE) tips with radius of curvature of 40 A. The cantilevers have been used in an experimental AFM data-storage system to read back data with an areal density of 10 Gb/cm/sup 2/. Four-legged cantilevers with both imaging and thermomechanical surface modification capabilities have been used to write 2-Gb/cm/sup 2/ data at 50 kb/s on a spinning polycarbonate sample and to subsequently read the data. AFM imaging has been successfully demonstrated with the cantilevers. Some cantilever designs have sufficient displacement resolution to detect their own mechanical-thermal noise in air. The INCISIVE tips also have applications to other types of sensors. |
| Databáze: | OpenAIRE |
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