Monolithic Integration of a Micropin-Fin Heat Sink in a 28-nm FPGA

Autor: Abdur Rahman, Yang Zhang, Muhannad S. Bakir, Thomas E. Sarvey, Colman Cheung, Aravind Dasu, Gutala Ravi Prakash
Rok vydání: 2017
Předmět:
Zdroj: IEEE Transactions on Components, Packaging and Manufacturing Technology. 7:1617-1624
ISSN: 2156-3985
2156-3950
DOI: 10.1109/tcpmt.2017.2740721
Popis: Microfluidic cooling has been demonstrated as an effective means of cooling microelectronic circuits with a very low convective thermal resistance and potential for integration in close proximity to the area of heat generation. However, microfluidic cooling experiments to date have been limited to silicon with resistive heaters representing the heat generating circuitry. In this paper, a micropin-fin heat sink is etched into the back side of an Altera Stratix V field-programmable gate array (FPGA), built in a 28-nm CMOS process. Thermal and electrical measurements are made running a benchmark pulse compression algorithm on the FPGA. Deionized water is used as a coolant with flow rates ranging from 0.15 to 3.0 mL/s and inlet temperature ranging from 21 °C to 50 °C. An average junction-to-inlet thermal resistance of 0.07 °C/W is achieved.
Databáze: OpenAIRE