Massively parallel simulations of Brownian dynamics particle transport in low pressure parallel‐plate reactors
| Autor: | Seung J. Choi, Daniel J. Rader, Anthony S. Geller |
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| Rok vydání: | 1996 |
| Předmět: | |
| Zdroj: | Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 14:660-665 |
| ISSN: | 1520-8559 0734-2101 |
| DOI: | 10.1116/1.580120 |
| Popis: | An understanding of particle transport is necessary to reduce contamination of semiconductor wafers during low‐pressure processing. The trajectories of particles in these reactors are determined by external forces (the most important being neutral fluid drag, thermophoresis, electrostatic, viscous ion drag, and gravitational), by Brownian motion (due to neutral and charged gas molecule collisions), and by particle inertia. Gas velocity and temperature fields are also needed for particle transport calculations, but conventional continuum fluid approximations break down at low pressures when the gas mean free path becomes comparable to chamber dimensions. Thus, in this work we use a massively parallel direct simulation Monte Carlo method to calculate low‐pressure internal gas flow fields which show temperature jump and velocity slip at the reactor boundaries. Because particle residence times can be short compared to particle response times in these low‐pressure systems (for which continuum diffusion theory ... |
| Databáze: | OpenAIRE |
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