Erratum: ‘‘Comparative study between gas- and liquid-phase silylation for the diffusion-enhanced silylated resist process’’ [J. Vac. Sci. Technol. B 9, 3399 (1991)]

Autor:	Bruno Roland, Ki-Ho Baik, L. Van den hove
Rok vydání:	1992
Předmět:	Resist Chemical engineering Silylation Chemistry Scientific method Polymer chemistry General Engineering Liquid phase Diffusion (business)
Zdroj:	Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 10:1229
ISSN:	0734-211X
DOI:	10.1116/1.585896
Databáze:	OpenAIRE
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