Spurious-Free S₁ Mode AlN/ScAlN-Based Lamb Wave Resonator With Trapezoidal Electrodes

Autor:	Tiancheng Luo, Qinwen Xu, Zhiwei Wen, Yuanhang Qu, Jie Zhou, Binghui Lin, Yao Cai, Yan Liu, Chengliang Sun
Rok vydání:	2023
Předmět:	Electrical and Electronic Engineering Electronic Optical and Magnetic Materials
Zdroj:	IEEE Electron Device Letters. 44:574-577
ISSN:	1558-0563 0741-3106
DOI:	10.1109/led.2023.3244585
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::1b75f6fc5eca2783ee6ff777fa565076 https://doi.org/10.1109/led.2023.3244585 Zobrazit plný text záznamu