Chemical Solution Deposition of Columnar-Grained Metallic Lanthanum Nitrate Thin Films
Autor: | Robert Primig, Dana Pitzer, Jian-Gong Cheng, Wolfram Wersing, Matthias Schreiter, Reinhard Gabl |
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Rok vydání: | 2003 |
Předmět: | |
Zdroj: | Journal of the American Ceramic Society. 86:1786-1788 |
ISSN: | 1551-2916 0002-7820 |
Popis: | Columnar and (100)-oriented LaNiO3 thin films were prepared on silicon substrates by a chemical solution deposition (CSD) process using a 0.05M solution. By reducing the individual layer thickness to 10 nm, columnar LaNiO3 films with a lateral grain size of ∼120 nm were obtained. The success of this approach required restricting the individual layer thickness to a value below the grain size observed for equiaxed films. This change in microstructure resulted in an improvement in conductivity. The columnar LaNiO3 film with a thickness of 300 nm showed a resistivity of 4.5 × 10−5Ω·cm, which is lower by one order of magnitude than that of fine-grain equiaxed films that typically result from CSD methods. |
Databáze: | OpenAIRE |
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