Chemical Solution Deposition of Columnar-Grained Metallic Lanthanum Nitrate Thin Films

Autor:	Robert Primig, Dana Pitzer, Jian-Gong Cheng, Wolfram Wersing, Matthias Schreiter, Reinhard Gabl
Rok vydání:	2003
Předmět:	Equiaxed crystals Silicon Scanning electron microscope Inorganic chemistry chemistry.chemical_element Microstructure Grain size chemistry Electrical resistivity and conductivity Materials Chemistry Ceramics and Composites Deposition (phase transition) Composite material Thin film
Zdroj:	Journal of the American Ceramic Society. 86:1786-1788
ISSN:	1551-2916 0002-7820
Popis:	Columnar and (100)-oriented LaNiO3 thin films were prepared on silicon substrates by a chemical solution deposition (CSD) process using a 0.05M solution. By reducing the individual layer thickness to 10 nm, columnar LaNiO3 films with a lateral grain size of ∼120 nm were obtained. The success of this approach required restricting the individual layer thickness to a value below the grain size observed for equiaxed films. This change in microstructure resulted in an improvement in conductivity. The columnar LaNiO3 film with a thickness of 300 nm showed a resistivity of 4.5 × 10−5Ω·cm, which is lower by one order of magnitude than that of fine-grain equiaxed films that typically result from CSD methods.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::1b7390786fced1fc03f060f9e3d5c284 https://doi.org/10.1111/j.1151-2916.2003.tb03555.x Zobrazit plný text záznamu Plný text ve formátu PDF