Three-dimensional computer simulation of plasma–solid interaction in the presence of magnetic field

Autor:	Vojtech Hruby, Z. Pekarek, Rudolf Hrach
Rok vydání:	2012
Předmět:	Materials science Flux Plasma Condensed Matter Physics Symmetry (physics) Surfaces Coatings and Films Computational physics Ion Magnetic field Particle Atomic physics Instrumentation Electrical conductor Voltage
Zdroj:	Vacuum. 86:1228-1231
ISSN:	0042-207X
DOI:	10.1016/j.vacuum.2011.04.007
Popis:	This paper describes computational simulations of the propagation of a magnetised plasma to inner parts of porous solids or cavities. The geometry of such a problem requires generally three-dimensional simulations due to lack of symmetry. We propose a hybrid method to overcome limitations of commonly used particle and fluid models. The hybrid method combines particle and fluid parts in an iterative manner to obtain results in a short time preserving information about individual particles. The hybrid model is applied to a study of ion propagation to a cylindrical hole in a conductive solid. The influence of a magnetic field and its orientation is discussed. The presence of the magnetic field enhances the flux of ions to the hole; the influence of voltage bias on the substrate is highly important.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::1b618194fd5b4f9e81cd9555f0f37858 https://doi.org/10.1016/j.vacuum.2011.04.007 Zobrazit plný text záznamu Full Text from ScienceDirect