62‐4: Late‐News Paper: Evaluation of polycrystalline silicon after Excimer laser annealing by Retardation measurement method

Autor:	Deok-Hoi Kim, Nak-Cho Choi, Beohm Rock Choi, Kie Hyun Nam, Eungtaek Kim
Rok vydání:	2019
Předmět:	Measurement method Polycrystalline silicon Materials science business.industry engineering Optoelectronics engineering.material business Excimer laser annealing
Zdroj:	SID Symposium Digest of Technical Papers. 50:885-887
ISSN:	2168-0159 0097-966X
DOI:	10.1002/sdtp.13064
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::1b4561c958e6c1ad2b9750e48e687792 https://doi.org/10.1002/sdtp.13064 Zobrazit plný text záznamu Plný text