Status of LWIR HgCdTe-on-Silicon FPA Technology

Autor: Whitney Mason, Yuanping Chen, S. Freeman, R. N. Jacobs, D. D. Edwall, Jose M. Arias, E. Piquette, M. Kangas, Andrew J. Stoltz, J. G. Pasko, M. Carmody, Nibir K. Dhar
Rok vydání: 2008
Předmět:
Zdroj: Journal of Electronic Materials. 37:1184-1188
ISSN: 1543-186X
0361-5235
DOI: 10.1007/s11664-008-0434-3
Popis: The use of silicon as an alternative substrate to bulk CdZnTe for epitaxial growth of HgCdTe for infrared detector applications is attractive because of potential cost savings as a result of the large available sizes and the relatively low cost of silicon substrates. However, the potential benefits of silicon as a substrate have been difficult to realize because of the technical challenges of growing low-defect-density HgCdTe on silicon where the lattice mismatch is ∼19%. This is especially true for long-wavelength infrared (LWIR) HgCdTe detectors where the performance can be limited by the high (∼5 × 106 cm−2) dislocation density typically found in HgCdTe grown on silicon. The current status of LWIR (9 μm to 11 μm at 78 K) HgCdTe on silicon focal-plane arrays (FPAs) is reviewed. Recent progress is covered including improvements in noise equivalent differential temperature (NEDT) and array operability. NEDT of 99% are highlighted for 640 × 480 pixel, 20-μm-pitch FPAs.
Databáze: OpenAIRE