Contrôle de procédés durant le micro-usinage de céramique par laser à excimère

Autor:	C. Stauter, J. Fontaine, A. Biernaux
Rok vydání:	1994
Předmět:	Shock wave Physics business.industry medicine.medical_treatment General Physics and Astronomy Ablation Laser Piezoelectricity law.invention Process conditions Optics Machining Deflection (engineering) law visual_art visual_art.visual_art_medium medicine Ceramic business
Zdroj:	Annales de Physique. 19:C1-253
ISSN:	1286-4838 0003-4169
DOI:	10.1051/anphys/1994057
Popis:	Characterization of the effects of the interaction between short laser pulses and a material has been made in the conditions of ceramic micro- machining. Fast heating of the target surface results in a pressure wave that propagates inside the sample and a shock wave in the surrounding gas medium. By monitoring the energy of the shock wave using a laser beam deflection technique and a piezoelectric transducer, it is possible to relate the ablation rate to the observed signals. Experiments have been made using Q-switched Nd:YAG and KrF lasers. At high fluences, in particular at 1,06 urn, gas breakdown drastically alters the process conditions and disperses the recorded data. Nevertheless, we have determined the range of validity for monitoring of the process using simple detection devices.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::1afc223b21f7b248d2244e316fb7ae39 https://doi.org/10.1051/anphys/1994057 Zobrazit plný text záznamu