Self-consistent simulation on multiple activation energy of retention characteristics in charge trapping flash memory

Autor: Seong-Wook Choi, Kwang Sun Jun, Young June Park, HuiJung Kim, Sungman Rhee, Sang-Yong Park
Rok vydání: 2015
Předmět:
Zdroj: Solid-State Electronics. 113:144-150
ISSN: 0038-1101
Popis: Non-Arrhenius behavior has been reported in a various temperature range for the retention time of CT Flash memories. In order to understand the physical origin of the multiple activation energy due to the non-Arrhenius behavior, we conduct a simulation study using a 3D self-consistent numerical simulator developed in-house. As a result, it is found that both vertical and lateral charge transport in the conduction band of nitride layer are responsible for the non-Arrhenius retention characteristic. Also, the tunneling current through the bottom oxide and a lifetime criteria are turned out to be the key parameters which determine the multiple activation energy.
Databáze: OpenAIRE