Thick yttrium-iron-garnet (YIG) films produced by pulsed laser deposition (PLD) for integration applications

Autor:	H. Buhay, Michael R. Daniel, N. J. Doyle, M.H. Hanes, J. Adam, M.M. Sopira, R.L. Messham, M.C. Driver, G.W. Eldridge
Rok vydání:	1995
Předmět:	Fabrication Materials science business.industry Yttrium iron garnet Dielectric Epitaxy Electronic Optical and Magnetic Materials Pulsed laser deposition chemistry.chemical_compound Semiconductor chemistry Optoelectronics Wafer Crystallite Electrical and Electronic Engineering business
Zdroj:	IEEE Transactions on Magnetics. 31:3832-3834
ISSN:	0018-9464
Popis:	High magnetic and dielectric quality, thick (50-100 /spl mu/m), epitaxial, yttrium-iron-garnet (YIG) films were deposited at high rate by PLD. A two-step (low temperature deposition followed by rapid thermal anneal) low thermal budget PLD process was demonstrated suitable to deposit thick polycrystalline YIG films on metallized Si and GaAs. A modified PLD apparatus is used to deposit uniform, 80-100 /spl mu/m, thick YIG films on 3-inch semiconductor wafers for integrated microwave circulator fabrication.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::1ab829119863384ef40a942ae0b17f38 https://doi.org/10.1109/20.489787 Zobrazit plný text záznamu