Low-temperature synthesis of 2D MoS2 on a plastic substrate for a flexible gas sensor
| Autor: | Jusang Park, Kyung Yong Ko, Jun Hyung Lim, Whang Je Woo, Yuxi Zhao, Youngjun Kim, Dong-Hyun Kim, Zonghoon Lee, Hyungjun Kim, Gyeong Hee Ryu, Jeong Gyu Song, Sunhee Lee |
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| Rok vydání: | 2018 |
| Předmět: |
Materials science
Photoemission spectroscopy 02 engineering and technology Chemical vapor deposition Substrate (electronics) 010402 general chemistry 021001 nanoscience & nanotechnology 01 natural sciences 0104 chemical sciences chemistry.chemical_compound symbols.namesake Chemical engineering chemistry Transmission electron microscopy Microscopy symbols General Materials Science 0210 nano-technology Raman spectroscopy Molybdenum disulfide Polyimide |
| Zdroj: | Nanoscale. 10:9338-9345 |
| ISSN: | 2040-3372 2040-3364 |
| Popis: | The efficient synthesis of two-dimensional molybdenum disulfide (2D MoS2) at low temperatures is essential for use in flexible devices. In this study, 2D MoS2 was grown directly at a low temperature of 200 °C on both hard (SiO2) and soft substrates (polyimide (PI)) using chemical vapor deposition (CVD) with Mo(CO)6 and H2S. We investigated the effect of the growth temperature and Mo concentration on the layered growth by Raman spectroscopy and microscopy. 2D MoS2 was grown by using low Mo concentration at a low temperature. Through optical microscopy, Raman spectroscopy, X-ray photoemission spectroscopy, photoluminescence, and transmission electron microscopy measurements, MoS2 produced by low-temperature CVD was determined to possess a layered structure with good uniformity, stoichiometry, and a controllable number of layers. Furthermore, we demonstrated the realization of a 2D MoS2-based flexible gas sensor on a PI substrate without any transfer processes, with competitive sensor performance and mechanical durability at room temperature. This fabrication process has potential for burgeoning flexible and wearable nanotechnology applications. |
| Databáze: | OpenAIRE |
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