3D finite element modeling of the micromachined microphone with corrugated diaphragm

Autor: Andrey V. Korshunov, V. O. Sabadash, B. A. Smolnikov, Evgenij N. Pyatishev, Mihail S. Lurie, Y. D. Akulshin, Alexei I. Borovkov
Rok vydání: 2001
Předmět:
Zdroj: Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering.
ISSN: 0277-786X
DOI: 10.1117/12.417673
Popis: Measurements of acoustic pressure oscillations on curvilinear surface streamlined by a flow, for example, on the wall of wind-tunnel or airfoil is necessary to supply for aeroacoustic appendices. Microphone should have the minimal sizes and feeler set flush-mounted. Such microphones are demanded for creation distributed audio-systems and noise reduction devices in the source. Developed the MEMS-microphone with corrugated diaphragm should have a sharp response, stability to effects of ram airflow and high level pressure. Preliminary simulation of design and technological parameters is necessary for creation of this microphone.
Databáze: OpenAIRE