Dual ion beam assisted magnetron deposition of biaxially textured YSZ and YBCO/YSZ thin films
| Autor: | S. Gnanarajan, N. Savvides |
|---|---|
| Rok vydání: | 2016 |
| Předmět: |
Materials science
Ion beam Metallurgy 02 engineering and technology Surfaces and Interfaces General Chemistry Yttrium barium copper oxide Substrate (electronics) 021001 nanoscience & nanotechnology Condensed Matter Physics Epitaxy 01 natural sciences Surfaces Coatings and Films chemistry.chemical_compound chemistry 0103 physical sciences Materials Chemistry Texture (crystalline) Thin film Composite material 010306 general physics 0210 nano-technology Ion beam-assisted deposition Yttria-stabilized zirconia |
| Zdroj: | Surface and Coatings Technology. 305:116-122 |
| ISSN: | 0257-8972 |
| Popis: | Biaxially textured yttria stabilized zirconia (YSZ) thin films were deposited on polished hastelloy and silicon substrates using ion beam assisted deposition (IBAD). The IBAD apparatus includes a planar magnetron fitted with a crystalline YSZ target to provide the film-forming species, and two Kaufman-type ion beam sources which provide Ar+ ions for bombarding the film during growth. The two ion beam sources were mounted symmetrically at 55° angles to the substrate plane normal, making 110° angle between them. Textured YSZ films were deposited under three different IBAD conditions: (a) films were bombarded by a single ion beam source (SIBAD), (b) films were bombarded by a single ion beam source for a time alternating from the two symmetric directions (AIBAD), and (c) by dual ion beam assisted deposition (DIBAD) where the film was bombarded simultaneously from the two symmetric directions. The X-ray φ-scan results indicate that DIBAD followed by epitaxial growth of YSZ produced the highest degree of biaxial texture in YSZ films. Superconducting yttrium barium copper oxide (YBCO) films deposited on highly textured DIBAD YSZ films had φ-scan full width at half maximum of 7.1° and 5.5° for hastelloy and silicon substrates, respectively. |
| Databáze: | OpenAIRE |
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