Development of Electroplated Magnesium Microstructures for Biodegradable Devices and Energy Sources
Autor: | Andac Armutlulu, Mark G. Allen, Richard H. Shafer, Florian Herrault, Melissa Tsang, Sue Ann Bidstrup Allen |
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Rok vydání: | 2014 |
Předmět: | |
Zdroj: | Journal of Microelectromechanical Systems. 23:1281-1289 |
ISSN: | 1941-0158 1057-7157 |
DOI: | 10.1109/jmems.2014.2360201 |
Popis: | This paper presents fabrication approaches for magnesium (Mg) microstructures embedded in biodegradable polymers using through-mold Mg electrodeposition and metal- transfer-molding. Biodegradable implantable electronics have garnered increasing interest from the medical community for the monitoring and treatment of transient diseases. Magnesium is a biodegradable metal with desirable properties, and the ability to micropattern Mg thick films (i.e., about >1 µm) with direct microelectromechanical systems (MEMS) integration would sup- port the development of more sophisticated and clinically relevant biodegradable devices and microsystems. Magnesium microstruc- tures were electroplated through micropatterned water-soluble molds in a nonaqueous electrolyte and transfer molded into a biodegradable polymer. Electroplated Mg compared favorably with commercial Mg foil based on elemental composition, crystal orientation, electrical resistivity, and corrosion behavior. Mag- nesium electroplated to a thickness of up to 50 µ ms howed a grain size of ∼10 µm, and minimum feature dimensions of 100 µm in width and spacing. Completely biodegradable Mg and poly-L-lactic acid constructs were demonstrated. The application of Mg thick films toward biodegradable energy sources was explored through the fabrication and testing of biodegradable Mg/Fe batteries. The batteries exhibited a capacity and power of up to 2.85 mAh and 39 µW, respectively. Results confirmed the advantages of electrodeposited Mg microstructures for biodegradable MEMS applications. (2014-0103) |
Databáze: | OpenAIRE |
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