SEM Investigation of Surface Defects Arising at the Formation of a Buried Nitrogen-Containing Layer in Silicon
| Autor: | A.V. Frantskevich, Anis M. Saad, A.K. Fedotov, E.I. Rau, A.V. Mazanik, N.V. Frantskevich |
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| Rok vydání: | 2007 |
| DOI: | 10.4028/3-908451-43-4.195 |
| Databáze: | OpenAIRE |
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