A Novel Piezoresistive Pressure Sensor Based on Cr-doped V2O3 Thin Film

Autor:	Michiel Gidts, Wei-Fan Hsu, Maria Recaman Payo, Shashwat Kushwaha, Chen Wang, Frederik Ceyssens, Dominiek Reynaerts, Jean-Pierre Locquet, Michael Kraft
Rok vydání:	2023
Zdroj:	2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS).
DOI:	10.1109/mems49605.2023.10052552
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::1a1d6566d18874a0810e0dfa2ecf11e6 https://doi.org/10.1109/mems49605.2023.10052552 Zobrazit plný text záznamu