Opto-tactile Sensor for 2D and 3D Measurement of Small Structures on Coordinate Measuring Machines

Autor:	C. Weiskirch, H. Kunzmann, F. Wäldele, Heinrich Schwenke
Rok vydání:	2001
Předmět:	3d measurement Engineering Basis (linear algebra) business.industry Mechanical Engineering Measuring principle Electronic engineering Sensitivity (control systems) business Industrial and Manufacturing Engineering Tactile sensor
Zdroj:	CIRP Annals. 50:361-364
ISSN:	0007-8506
DOI:	10.1016/s0007-8506(07)62140-4
Popis:	A novel tactile probing system for dimensional measurement of small structures is presented. The measurement principle combines optical and mechanical techniques and allows probing elements below 50 μm to be realized. The measurement uncertainties achievable are in the sub-micron order. With this full 3D sensitivity on the basis of the opto-tactile concept is achieved. Some exemplary measurements show the capability of the new sensor.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::1a184f35a81d5eefe246e5ea5b9574b0 https://doi.org/10.1016/s0007-8506(07)62140-4 Zobrazit plný text záznamu Full Text from ScienceDirect