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Theoretical calculations of term structure are carried out for the ground configurations 4dw, of atomic ions in the Sn isonuclear sequence. Atomic computations are performed to give a detailed account of the transitions in Sn+6 to Sn+13 ions. The spectrum is calculated for the most important excited configurations 4p5 4dn+1, 4dn−1 4f1, and 4dn−1 5p1 with respect to the ground configuration 4dn, with n=8–1, respectively. The importance of 4p–4d, 4d–4f, and 4d–5p transitions is stressed, as well as the need for the configuration-interaction CI treatment of the Δ n = 0 transitions. In the region of importance for extreme ultraviolet (EUV) lithography around 13.4 nm, the strongest lines were expected to be 4dn–4p5 4dn+1 and 4dn–4dn−1 4f1. |
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