LiGA Research and Service at CAMD
| Autor: | Zhong Geng Ling, Yohannes M. Desta, Yoonyoung Jin, Varshni Singh, Jost Goettert, Proyag Datta |
|---|---|
| Rok vydání: | 2006 |
| Předmět: | |
| Zdroj: | Journal of Physics: Conference Series. 34:912-918 |
| ISSN: | 1742-6596 1742-6588 |
| DOI: | 10.1088/1742-6596/34/1/151 |
| Popis: | Since 1995 CAMD has been offering exposure services, so called print shop for a variety of users interested in making precision High-Aspect-Ratio Microstructures (HARMST) for various application. Services have been expanded beyond only the print shop service in recent years and now include x-ray mask fabrication, substrate preparation for PMMA and SU- 8 resists, electroplating, finishing and molding. Metallic and polymeric parts are now routinely fabricated for precision engineering, micro-fluidic and micro-optic applications. This paper presents a brief overview of the actual status of LiGA services provided at CAMD including ongoing research efforts and examples of LiGA components for different applications. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|