Surface hydrophobicity of an organosilicon film modified by a silver seed layer with the nanoparticle structures

Autor: Tai-Hong Chen, Tsung-Hsin Lee, Zheng-Wen Xu, Jin-How Chang, Day-Shan Liu, Yu-Kai Zhang, Pei-Yu Li
Rok vydání: 2018
Předmět:
Zdroj: 2018 IEEE International Conference on Applied System Invention (ICASI).
DOI: 10.1109/icasi.2018.8394600
Popis: In this work, a silver seed layer was deposited onto the silicon substrate prior to the deposition of the organosilicon film with the hydrophobic surface. Nanoparticle structures of the seed layer were formed after a post-annealing treatment. The surface morphology of the organosilicon film was well conformal to the silver seed layer with the nanoparticle structures. The resulting surface hydrophobicity evaluated from the water contact angle of the organosilicon film was markedly increased from 100° to 122°.
Databáze: OpenAIRE