6-DoF Full Robotic Calibration Based on 1-D Interferometric Measurements for Microscale and Nanoscale Applications

Autor:	Cédric Clévy, Olivier Lehmann, Philippe Lutz, Houari Bettahar, Nadège Courjal
Rok vydání:	2022
Předmět:	Interferometry Optics Materials science Control and Systems Engineering business.industry Calibration Electrical and Electronic Engineering business Nanoscopic scale Microscale chemistry
Zdroj:	IEEE Transactions on Automation Science and Engineering. 19:348-359
ISSN:	1558-3783 1545-5955
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::19f62019f6fc39f1166b1621cd7ee2f6 https://doi.org/10.1109/tase.2020.3031856 Zobrazit plný text záznamu