The role of process system engineering (PSE) in integrated circuit (IC) manufacturing
| Autor: | Daniel R. Lewin, Sivan Lachman-Shalem, Benyamin Grosman |
|---|---|
| Rok vydání: | 2007 |
| Předmět: |
Engineering
business.industry Process (engineering) Applied Mathematics Control (management) Genetic programming Integrated circuit Work in process Computer Science Applications law.invention Control and Systems Engineering law Genetic algorithm Systems engineering Process control Electrical and Electronic Engineering business Advanced process control |
| Zdroj: | Control Engineering Practice. 15:793-802 |
| ISSN: | 0967-0661 |
| DOI: | 10.1016/j.conengprac.2006.04.003 |
| Popis: | The manufacture of integrated circuits is driven by a demand for faster calculation capabilities and lower costs, which will require the development of a new generation of manufacturing tools to increase yield productivity, spearheaded by improved measurement devices and advanced process control. The objectives of this paper are to review of the challenges in applying two areas of expertise in process systems engineering (PSE), namely process monitoring and control, and to motivate more academics working in PSE to get actively involved. PSE solutions appropriate for these challenges involve harnessing multivariate statistics, automated modeling approaches like genetic programming, and multivariable model-based control. The paper is illustrated with several example applications, all tested in fabrication facilities in Israel. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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