A new pressure sensor measured by heat transfer

Autor:	K. Tsutsumi, M. Taruya, A. Koshimizu, S. Kodama, Hiroshi Ohji, Naoki Yutani
Rok vydání:	2003
Předmět:	Materials science business.industry Electrical engineering Diaphragm (mechanical device) Heat sink Pressure sensor Heat capacity law.invention Surface micromachining Pressure measurement law Heat transfer Optoelectronics Resistor business
Zdroj:	Proceedings of IEEE Sensors.
DOI:	10.1109/icsens.2002.1037243
Popis:	This paper presents a newly developed pressure sensor. The principle of its pressure measurement is based on heat transfer from a heat source fabricated on a sensor element to a metal diaphragm, to which pressure is applied. The sensor element is fabricated by micromachining techniques in which four mask process steps are used that are compatible with IC processing. The measurement results show a good linearity (3.5 %FS) and quick response (100 Hz) due to the small thermal capacity of the sensor element.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::19eae3ca6587774c6135ed212326acc7 https://doi.org/10.1109/icsens.2002.1037243 Zobrazit plný text záznamu