Patterned growth of single-walled carbon nanotubes on full 4-inch wafers

Autor:	Yiming Li, Ali Javey, Hongjie Dai, Robert Chen, Nathan R. Franklin
Rok vydání:	2001
Předmět:	Optical properties of carbon nanotubes Nanotube Materials science Nanolithography Physics and Astronomy (miscellaneous) law Wafer Nanotechnology Chemical vapor deposition Carbon nanotube supported catalyst Carbon nanotube Photolithography law.invention
Zdroj:	Applied Physics Letters. 79:4571-4573
ISSN:	1077-3118 0003-6951
Popis:	Patterned growth of single-walled carbon nanotubes (SWNTs) is achieved on full 4-in. SiO2/Si wafers. Catalytic islands with high uniformity over the entire wafer are obtained by a deep ultraviolet photolithography technique. Growth by chemical vapor deposition of methane is found to be very sensitive to the amount of H2 co-flow. Understanding of the chemistry enables the growth of high quality SWNTs from massive arrays (107–108) of well-defined surface sites. The scale up in patterned nanotube growth shall pave the way to large-scale molecular wire devices.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::19e0683c1e69314dbd5c6ea4f0f53f56 https://doi.org/10.1063/1.1429294 Zobrazit plný text záznamu