Quick Pumping to Ultra High Vacuum without Baking and its Electric Power Saving Effect by Reduction of Water Vapor in Exposure Gas

Autor:	Ko Yamazaki, Junichi Shike, Masahiro Kitano, Shigeki Kato, Hiroyuki Kato, Motoi Yamagata
Rok vydání:	2014
Předmět:	Electrolysis of water Chemistry business.industry Ultra-high vacuum Analytical chemistry Optoelectronics General Materials Science Surfaces and Interfaces Electric power business Instrumentation Spectroscopy
Zdroj:	Journal of the Vacuum Society of Japan. 57:96-101
ISSN:	1882-4749 1882-2398
DOI:	10.3131/jvsj2.57.96
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::19dfd3702ccc124e084d3f0fc64f643c https://doi.org/10.3131/jvsj2.57.96 Zobrazit plný text záznamu