Large area μm and sub-μm structuring of gold layers with microcontact printing using 4″ and 1″ PDMS stamps

Autor:	Rainer Schöftner, E Lausecker, Wolfgang Schwinger, Iris Bergmair, Michael Mühlberger
Rok vydání:	2008
Předmět:	History Materials science Scanning electron microscope PDMS stamp Nanotechnology Structuring Computer Science Applications Education law.invention Optical microscope law Microcontact printing Wafer Photolithography Lithography
Zdroj:	Journal of Physics: Conference Series. 100:052024
ISSN:	1742-6596
DOI:	10.1088/1742-6596/100/5/052024
Popis:	Microcontact printing (μCP) using PDMS stamps and alkanethiol chemistry is a straightforward method for the structuring of gold layers. We fabricated PDMS stamps from 4'' Si wafers structured by photolithography, as well as from 1'' masters produced with UV-nanoimprint lithography (UV-NIL) directly on a rigid glass back-plate. Large area μm and sub-μm structuring of gold layers was demonstrated using these PDMS stamps. The masters, the stamps and the resulting gold structures were analyzed using scanning electron microscopy (SEM), atomic force microscopy (AFM) and optical microscopy.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::1937176b4048ce19f283fc9f507a252f https://doi.org/10.1088/1742-6596/100/5/052024 Zobrazit plný text záznamu