Thermal investigation of micro-filament heaters
| Autor: | István Bársony, A. Morrissey, Zs. Vı́zváry, M. Ádám, Cs. Dücső, Péter Fürjes |
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| Rok vydání: | 2002 |
| Předmět: |
Work (thermodynamics)
Silicon Integrable system Metals and Alloys chemistry.chemical_element Thermodynamics Mechanics Condensed Matter Physics Temperature measurement Surfaces Coatings and Films Electronic Optical and Magnetic Materials Protein filament chemistry Thermal radiation Thermal Thermal simulation Electrical and Electronic Engineering Instrumentation |
| Zdroj: | Sensors and Actuators A: Physical. 99:98-103 |
| ISSN: | 0924-4247 |
| DOI: | 10.1016/s0924-4247(01)00905-0 |
| Popis: | The present work is a study of the thermal properties of integrable micro-filaments. The realised structure is the key element of the targeted integrable micro-pellistor for catalytic gas sensing, therefore, its thermal characterisation is of crucial importance. Direct measurement of temperature in the micro-heater is unfortunately troublesome due to the small dimensions used. In this work the temperature of the micro-filament was measured by two different methods, based upon the resistance alteration of the filament, and analysis of the thermal radiation of the heated micro-filament. The reason for the differences was explained by inherent features of the methods, and confirmed by thermal simulation. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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