Rapid Prototyping of MOX Gas Sensors in Form-Factor of SMD Packages
| Autor: | Konstantin Oblov, Anastasia Ivanova, B. Podlepetsky, Anastasiya Gorshkova, Nikolay Samotaev |
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| Rok vydání: | 2019 |
| Předmět: |
Rapid prototyping
Microelectromechanical systems 010308 nuclear & particles physics business.industry Computer science 010401 analytical chemistry Mechanical engineering 01 natural sciences 0104 chemical sciences Form factor (design) Mechanical system visual_art 0103 physical sciences visual_art.visual_art_medium Ceramic Internet of Things business MOX fuel |
| Zdroj: | 2019 IEEE 31st International Conference on Microelectronics (MIEL). |
| Popis: | this work discusses the design of flexible laser micromilling technology for fast prototyping metal oxide based (MOX) gas sensors in SMD packages as a alternative to traditional silicon clean-room technologies. By laser micromilling technology possible to fabricate custom Micro Electro Mechanical System (MEMS) microhotplate platform and also SMD packages for MOX sensor, that gives complete solution for integration one in devices using IoT conception. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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