P x O y Evaporation from SiP2 O 7 and Its Relationship to Phosphosilicate Glass Films

Autor:	J. R. Flemish, R. E. Tressler
Rok vydání:	1991
Předmět:	Chemical engineering Renewable Energy Sustainability and the Environment Chemistry Inorganic chemistry Materials Chemistry Electrochemistry Evaporation Condensed Matter Physics Phosphosilicate glass Surfaces Coatings and Films Electronic Optical and Magnetic Materials
Zdroj:	Journal of The Electrochemical Society. 138:3743-3747
ISSN:	1945-7111 0013-4651
DOI:	10.1149/1.2085492
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::18ef01d2c000a5e51dcd8791d537cce4 https://doi.org/10.1149/1.2085492 Zobrazit plný text záznamu