Measuring The Temperature and Density of Secondary Electrons in an Argon Electron-Beam Plasma
| Autor: | V. O. Konstantinov, R. G. Sharafutdinov, V. G. Shchukin |
|---|---|
| Rok vydání: | 2018 |
| Předmět: |
Langmuir
Jet (fluid) Materials science Argon Silicon Mechanical Engineering chemistry.chemical_element 02 engineering and technology Plasma 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Secondary electrons 010305 fluids & plasmas chemistry Physics::Plasma Physics Mechanics of Materials 0103 physical sciences Cathode ray Atomic physics 0210 nano-technology Plasmatron |
| Zdroj: | Journal of Applied Mechanics and Technical Physics. 59:867-873 |
| ISSN: | 1573-8620 0021-8944 |
| Popis: | The results of temperature and density measurements of secondary electrons in a free jet of argon, activated in an electron beam plasma, carried out using a Langmuir double electrostatic probe. A cold plasmatron prototype with a primary beam energy of 1 keV is used obtain a jet of dense cold plasma with a cross size of approximately 80 mm and parameters with which silicon layers may be deposited with necessary characteristics in a forvacuum pressure range. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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