Design optimization and simulation of a diamond based piezoresistive pressure sensor for high temperature application
| Autor: | Vinod Belwanshi, Anita Topkar |
|---|---|
| Rok vydání: | 2019 |
| Předmět: |
010302 applied physics
Materials science business.industry Diamond A diamond Diaphragm (mechanical device) 02 engineering and technology Edge (geometry) engineering.material 021001 nanoscience & nanotechnology 01 natural sciences Piezoresistive effect Transverse plane 0103 physical sciences engineering Optoelectronics 0210 nano-technology business Sensitivity (electronics) Piezoresistive pressure sensors |
| Zdroj: | Materials Today: Proceedings. 18:1017-1024 |
| ISSN: | 2214-7853 |
| Popis: | To investigate the performance of diamond based piezoresistive pressure sensors, we have carried out a simulation study for obtaining an estimate of the pressure response. The sensor comprised of a thin diaphragm of diamond as a primary sensing element and boron doped diamond piezoresistors as transduction elements. The diaphragm geometry was optimized to 750 μm × 750 μm with 35 μm diaphragm thickness for a pressure range up to 40 MPa. Subsequently, the placement of diamond piezoresistors on the top of the thin diaphragm was optimized to get the best sensitivity. Since diamond has a higher piezoresistive coefficient in the longitudinal direction, a configuration of two longitudinal piezoresistors near to diaphragm edge and the other two transverse piezoresistors near to the diaphragm centre was used for the placement of piezoresistors. The voltage response of the piezoresistive pressure sensor was estimated using simulations. A sensitivity of 0.27 mV/V/MPa was obtained for the optimized sensor parameters. |
| Databáze: | OpenAIRE |
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