Analysis of charged device model (CDM) ESD in MEMS
| Autor: | William D. Greason |
|---|---|
| Rok vydání: | 2010 |
| Předmět: |
Microelectromechanical systems
Materials science business.industry Capacitive sensing Charge (physics) Test method Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Electric field embryonic structures Stiction Charged-device model Optoelectronics Electrical and Electronic Engineering business Biotechnology Voltage |
| Zdroj: | Journal of Electrostatics. 68:159-167 |
| ISSN: | 0304-3886 |
| DOI: | 10.1016/j.elstat.2009.12.002 |
| Popis: | The effect of charge injection due to CDM ESD in capacitive MEMS structures is analyzed. The results show that as feature size is reduced, ESD injected charge produces a change for the stiction effect which is inversely proportional to the square of the plate area and a change in the dielectric layer breakdown which is inversely proportional to the plate area. An electric field model is developed to examine charge and voltage modes in MEMS. A charge injection test method is proposed to determine the susceptibility of MEMS to CDM ESD. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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