Influence of induced stress on AlN-solidly mounted resonators
| Autor: | B. Díaz-Durán, Teona Mirea, Marta Clement, Jimena Olivares, A. Delicado, Enrique Iborra |
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| Rok vydání: | 2016 |
| Předmět: |
Coupling
Materials science Silicon 010401 analytical chemistry chemistry.chemical_element 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences 0104 chemical sciences Condensed Matter::Materials Science In plane Resonator Induced stress chemistry Shear (geology) sense organs Thin film Composite material 0210 nano-technology |
| Zdroj: | 2016 European Frequency and Time Forum (EFTF). |
| DOI: | 10.1109/eftf.2016.7477834 |
| Popis: | The frequency variation of solidly mounted resonators made with AlN thin films operating in longitudinal and shear acoustic modes with induced in plane mechanical strain is presented. The induced deformation range is in the hundreds of microstrains and the frequency variations in the hundreds of kHz, giving coefficients of resonant frequency with deformation in the order of 56% per unit strain. The influence on this parameter of the resonant mode, coupling factor and frequency is analyzed. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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