| Autor: |
Jonas Zurcher, Marcel Suter, George Chatzipirpiridis, Olgaç Ergeneman, Christofer Hierold, Bradley J. Nelson, Silvio Graf, Salvador Pané |
| Rok vydání: |
2009 |
| Předmět: |
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| Zdroj: |
2009 International Symposium on Optomechatronic Technologies. |
| DOI: |
10.1109/isot.2009.5326063 |
| Popis: |
Magnetic polymer microactuators made of SU-8 and superparamagnetic nanoparticles are reported. Homogenous distribution of nanoparticles in the composite was obtained using superparamagnetic nanoparticles and a surfactant. The magnetic polymer composite (MPC) was micromachined into cantilevers using photolithography. The magnetic characterization of the MPC was performed by a superconducting quantum interference device (SQUID). An electromagnet applied magnetic forces to this composite. The force per volume of composite was determined experimentally by measuring the force on a film of MPC using a micro-force sensor. The cantilevers were excited with an AC electromagnet at different frequencies, and their resonance modes were captured by a laser-Doppler vibrometer. Deflections were increased about 10 times by the addition of a DC field. The tip deflection amplitude of a cantilever (160 µm x 1.65 µm) in resonance was found to be 63 nm at 15.78kHz. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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