Excimer laser-induced microbumps on preheated BK7-glass

Autor:	J. Ihlemann, N. Mechkarov, G. Danev, P. Zahariev
Rok vydání:	2009
Předmět:	Microlens Materials science Fabrication Excimer laser business.industry Borosilicate glass medicine.medical_treatment General Chemistry Substrate (electronics) Nanosecond Laser law.invention Optics law medicine General Materials Science Composite material business Glass transition
Zdroj:	Applied Physics A. 95:639-642
ISSN:	1432-0630 0947-8396
Popis:	Microbumps on BK7-glass are made by nanosecond KrF-excimer laser irradiation. Bumps with heights in the micrometer-range and a diameter of about 20 μm are reproducibly obtained in the case of a preheated glass substrate. Preheating and laser-induced local heating act together to exceed the glass transition temperature on a volume forming a bump due to the action of surface tension. This process may open up a route to the rapid fabrication of microlens arrays.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::1854ee1eebb87223c855f495f821b2e4 https://doi.org/10.1007/s00339-009-5143-0 Zobrazit plný text záznamu Plný text ve formátu PDF