Change in Elastic Deformations in SiC Films during Their Growth by the Coordinated Atomic Substitution Method on Si Substrates

Autor:	Yu. A. Eremeev, M. G. Vorobev, A. S. Grashchenko, A. V. Semencha, A. V. Osipov, S. A. Kukushkin
Rok vydání:	2022
Předmět:	Condensed Matter Physics Electronic Optical and Magnetic Materials
Zdroj:	Physics of the Solid State. 64:511-515
ISSN:	1090-6460 1063-7834
DOI:	10.1134/s1063783422110038
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::182785c4e353c5988b7c4c6d52db464b https://doi.org/10.1134/s1063783422110038 Zobrazit plný text záznamu Full text from SpringerLink