Change in Elastic Deformations in SiC Films during Their Growth by the Coordinated Atomic Substitution Method on Si Substrates

Autor: Yu. A. Eremeev, M. G. Vorobev, A. S. Grashchenko, A. V. Semencha, A. V. Osipov, S. A. Kukushkin
Rok vydání: 2022
Předmět:
Zdroj: Physics of the Solid State. 64:511-515
ISSN: 1090-6460
1063-7834
Databáze: OpenAIRE